Processing outcomes of the AFM probe-based machining approach with different feed directions

We present experimental and theoretical results to describe and explain processing outcomes when producing nanochannels that are a few times wider than the atomic force microscope (AFM) probe using an AFM. This is achieved when AFM tip-based machining is performed with reciprocating motion of the tip of the AFM probe. In this case, different feed directions with respect to the orientation of the AFM probe can be used. The machining outputs of interest are the chip formation process, obtained machined quality, and variation in the achieved channel depth. A three-sided pyramidal diamond probe was used under load-controlled conditions. Three feed directions were first investigated in detail. The direction parallel to and towards the probe cantilever, which is defined as “edge forward”, was then chosen for further